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Demo units available for loan! It includes brush cleaning and fine jet cleaning.
This machine is a resist stripping device. The robot automatically transports the cassette set in the loader, goes through each processing stage, dries it with hot air blow/spin dryer, and discharges it to the unloader. For more details, please contact us.
By eliminating the liquid medication cleaning process, it is possible to reduce the installation area of the wet bench!
"AURORA" is a low-temperature resist stripping device that can remove resist after ion implantation. By combining plasma treatment and ozone water treatment, it can strip without residue, and it also supports stripping of underlying films (such as Si, SiO2) without film edge issues. Additionally, by eliminating chemical cleaning processes such as sulfuric peroxide and ammonia peroxide, it is possible to reduce running costs and the number of processes. A fast removal rate (2-4μm/min) achieves high throughput. [Features] ■ Stripping performance ■ Cost reduction ■ Reduction of process steps ■ Reduction of installation area *For more details, please feel free to contact us.
Introducing a system that automatically processes each step from stripping, rinsing, to spin drying!
We would like to introduce the "Sheet-Type Resist Stripping Device" that we handle. By simply setting a FOUP or dedicated cassette on the load port, the clean robot automatically transports the workpieces. It is also capable of manufacturing manual development devices. The work materials supported include Si, SiC, GaN, GaAs, InP, ceramics, quartz, resin, glass, SUS plates, and more. 【Specifications (partial)】 ■ Two-stage cup (upper stage: resist, lower stage: rinse) ■ Stripping solution: DMSO/TMAH, polyimide, etc. (independent chamber) ■ Rinse solution: polyimide, etc. ■ Back rinse: DIW, polyimide, reusable liquid, etc. ■ Stripping and rinse solution supply and recovery tank can be built into the device *For more details, please download the PDF or feel free to contact us.
High aspect ratio structure zero residue stripping
The latest integrated recovery unit enables the rapid removal of stripped resist.
